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Halocarbon 14, Tetrafluoromethane

Name: Tetrafluoromethane
Formula: CF4
Molecular weight: 88.005
Specific volume: 0.27 m3 /kg @ 21o C
                      4.4 ft3 /lb @ 70o F
CAS Registry Number: 75-73-0
UN Number: UN 1982
DOT Proper Shipping Name: Tetrafluoromethane, compressed
DOT Classification: 2.2, (Non-flammable Gas)
Grades: Custom grades available to 99.999%

Cylinder information:

Cylinder Size**

  Valve  Connection

Pressure psig@21oC

Content Lb/cyl

Content Kg/cyl


DISS 716, CGA 320


68 lb

31 kg


DISS 716, CGA 320


24 lb

11 kg

        **SCP fills customer owned cylinders. This is a sample of common cylinders sizes.**

Applications: Semiconductor; etching of silicon oxides & CVD/PECVD chamber clean, fiber optics.

Additional information: Halocarbon 14 (Tetrafluoromethane) (CF4) is a colorless, nontoxic, nonflammable, noncorrosive gas with a slight ether-like odor. Halocarbon 14 is normally compressed and shipped at high pressure.

Download Product PDF    Download MSDS

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