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Halocarbon 116, Hexafluoroethane

Name: Hexafluoroethane
Formula: C2F6
Molecular weight: 138.01
Specific volume: 0.174 m3 /kg @ 21o C
                      2.8 ft3 /lb @ 70o F
CAS Registry Number: 75-16-4
UN Number: UN 2193
DOT Proper Shipping Name: 2.2, (Non-flammable Gas)
Grades: Custom grades available to 99.999%

Cylinder information:

Cylinder Size**

  Valve  Connection

Pressure psig@21oC

Content US

Content Metric


DISS 716, CGA 660


95 lb

43 kg


DISS 716, CGA 660


22 lb

10 kg

     **SCP fills customer owned cylinders. This is an example of common cylinders sizes.**

Applications: Semiconductor; etching of silicon oxides & CVD/PECVD chamber clean, refrigerant blends R508A (61%) and R508B (54%), fire suppression (gels).

Additional information: Halocarbon 116 (Hexafluoroethane) (C2F6) is a colorless, nontoxic, noncorrosive, nonflammable gas which is extremely stable.



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